Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11257702 | Power supply apparatus for electrostatic chuck and substrate control method | Masanori Ito, Yasushi Iwata | 2022-02-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11257702 | Power supply apparatus for electrostatic chuck and substrate control method | Masanori Ito, Yasushi Iwata | 2022-02-22 |