Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532458 | Active gas generation apparatus | Ren ARITA, Kensuke Watanabe | 2022-12-20 |
| 11466366 | Electric discharge generator and power supply device of electric discharge generator | Yoichiro Tabata, Kensuke Watanabe | 2022-10-11 |
| 11453945 | Gas supply apparatus | Kensuke Watanabe, Yoichiro Tabata | 2022-09-27 |
| 11309167 | Active gas generation apparatus and deposition processing apparatus | Kensuke Watanabe, Ren ARITA | 2022-04-19 |
| 11239059 | Active gas generation apparatus | Kensuke Watanabe, Ren ARITA, Yoshihito Yamada, Yoichiro Tabata | 2022-02-01 |