Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532458 | Active gas generation apparatus | Kensuke Watanabe, Shinichi Nishimura | 2022-12-20 |
| 11309167 | Active gas generation apparatus and deposition processing apparatus | Kensuke Watanabe, Shinichi Nishimura | 2022-04-19 |
| 11239059 | Active gas generation apparatus | Kensuke Watanabe, Shinichi Nishimura, Yoshihito Yamada, Yoichiro Tabata | 2022-02-01 |