Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11281099 | Resist composition, method of forming resist pattern, compound, acid generator, and method of producing compound | Hiroto Yamazaki, Masatoshi Arai | 2022-03-22 |
| 11256169 | Resist composition, and method of forming resist pattern | Takuya Ikeda, Nobuhiro MICHIBAYASHI, Mari MURATA, Hiroto Yamazaki, Masatoshi Arai | 2022-02-22 |
| 11221557 | Resist composition, method of forming resist pattern, compound, and acid generator | Takuya Ikeda, Masahiro SHIOSAKI, Masatoshi Arai | 2022-01-11 |