Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221557 | Resist composition, method of forming resist pattern, compound, and acid generator | Takuya Ikeda, Masatoshi Arai, Yoshitaka Komuro | 2022-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11221557 | Resist composition, method of forming resist pattern, compound, and acid generator | Takuya Ikeda, Masatoshi Arai, Yoshitaka Komuro | 2022-01-11 |