Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480881 | Substrate processing method, storage medium, and substrate processing apparatus | Kouichirou Tanaka, Masahiro Fukuda, Atsushi Ookouchi | 2022-10-25 |
| 11407005 | Coating method, coating apparatus and recording medium | Masatoshi Kawakita, Kosuke Yoshihara | 2022-08-09 |