Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480881 | Substrate processing method, storage medium, and substrate processing apparatus | Yusaku Hashimoto, Kouichirou Tanaka, Masahiro Fukuda | 2022-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480881 | Substrate processing method, storage medium, and substrate processing apparatus | Yusaku Hashimoto, Kouichirou Tanaka, Masahiro Fukuda | 2022-10-25 |