Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476132 | Sealing structure, vacuum processing apparatus and sealing method | Hachishiro Iizuka, Masahisa Watanabe | 2022-10-18 |
| 11417514 | Film forming method and film forming apparatus | Toyohiro KAMADA, Shinichi Ike, Shuji AZUMO | 2022-08-16 |