Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476132 | Sealing structure, vacuum processing apparatus and sealing method | Masahisa Watanabe, Yuichiro WAGATSUMA | 2022-10-18 |
| 11414754 | Film forming apparatus | — | 2022-08-16 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476132 | Sealing structure, vacuum processing apparatus and sealing method | Masahisa Watanabe, Yuichiro WAGATSUMA | 2022-10-18 |
| 11414754 | Film forming apparatus | — | 2022-08-16 |