Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430664 | Etching method and plasma processing apparatus | Masaaki Kikuchi, Wataru Togashi, Yasunori Hatamura | 2022-08-30 |
| 11328934 | Etching method and substrate processing apparatus | Sho OIKAWA | 2022-05-10 |