Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430664 | Etching method and plasma processing apparatus | Wakako Ishida, Wataru Togashi, Yasunori Hatamura | 2022-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430664 | Etching method and plasma processing apparatus | Wakako Ishida, Wataru Togashi, Yasunori Hatamura | 2022-08-30 |