Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404281 | Method of etching silicon containing films selectively against each other | Sho Tominaga | 2022-08-02 |
| 11342167 | Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus | Jin Kudo | 2022-05-24 |
| 11251049 | Etching method and plasma processing apparatus | Masahiro Tadokoro | 2022-02-15 |