Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342167 | Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus | Taku Gohira | 2022-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342167 | Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus | Taku Gohira | 2022-05-24 |