Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515183 | Substrate processing system | Takashi Kumagai, Akira Kodashima | 2022-11-29 |
| 11495480 | Substrate processing system | Takashi Kumagai, Akira Kodashima, Keisuke YOSHIMURA | 2022-11-08 |