Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495480 | Substrate processing system | Suguru Motegi, Takashi Kumagai, Akira Kodashima | 2022-11-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495480 | Substrate processing system | Suguru Motegi, Takashi Kumagai, Akira Kodashima | 2022-11-08 |