Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515142 | Method of cleaning substrate processing apparatus, and substrate processing system | Pohan Huang | 2022-11-29 |
| 11344931 | Method of removing particles of substrate processing apparatus, and substrate processing apparatus | Gentaro Goshi | 2022-05-31 |