Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11446588 | Substrate processing apparatus and substrate processing method | — | 2022-09-20 |
| 11344931 | Method of removing particles of substrate processing apparatus, and substrate processing apparatus | Shogo Fukui | 2022-05-31 |