Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404283 | Etching method | Nobuaki Seki, Takahiko Kato | 2022-08-02 |
| 11361945 | Plasma processing apparatus, processing system, and method of etching porous film | — | 2022-06-14 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404283 | Etching method | Nobuaki Seki, Takahiko Kato | 2022-08-02 |
| 11361945 | Plasma processing apparatus, processing system, and method of etching porous film | — | 2022-06-14 |