Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404283 | Etching method | Shigeru Tahara, Nobuaki Seki | 2022-08-02 |
| 11237544 | Information processing device, program, process treatment executing device, and information processing system | Hironori MOKI | 2022-02-01 |