Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532492 | Substrate processing apparatus and substrate processing method | Katsuhiro Morikawa | 2022-12-20 |
| 11510284 | Substrate processing apparatus | Satoshi Morita, Katsuhiro Morikawa, Kouichi Mizunaga, Kouzou Kawahara | 2022-11-22 |