Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532492 | Substrate processing apparatus and substrate processing method | Masami Akimoto | 2022-12-20 |
| 11515182 | Drying apparatus, substrate processing system, and drying method | — | 2022-11-29 |
| 11510284 | Substrate processing apparatus | Satoshi Morita, Masami Akimoto, Kouichi Mizunaga, Kouzou Kawahara | 2022-11-22 |
| 11244849 | Substrate transfer device and substrate transfer method | Yuta Matsushima | 2022-02-08 |