Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11402313 | Foreign substance detection device and foreign substance detection method | Masato Hayashi, Kohei Noguchi, Daisuke Kajiwara | 2022-08-02 |
| 11340152 | Substrate processing apparatus, substrate processing system, and substrate processing method | Masato Hayashi, Kohei Noguchi, Makoto Ogata | 2022-05-24 |