Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11340152 | Substrate processing apparatus, substrate processing system, and substrate processing method | Masato Hayashi, Kohei Noguchi, Koudai Higashi | 2022-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11340152 | Substrate processing apparatus, substrate processing system, and substrate processing method | Masato Hayashi, Kohei Noguchi, Koudai Higashi | 2022-05-24 |