Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482431 | Substrate processing apparatus and substrate processing method | Norifumi Kohama, Norio Wada, Yosuke Omori, Kenji Sugakawa | 2022-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482431 | Substrate processing apparatus and substrate processing method | Norifumi Kohama, Norio Wada, Yosuke Omori, Kenji Sugakawa | 2022-10-25 |