Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373877 | Methods and apparatus for in-situ protection liners for high aspect ratio reactive ion etching | Daisuke Shimizu, Taiki Hatakeyama, Shinichi Koseki, Sean S. Kang, Jairaj Payyapilly | 2022-06-28 |
| 11264246 | Plasma etching method for selectively etching silicon oxide with respect to silicon nitride | Akihiro Tsuji | 2022-03-01 |