Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462412 | Etching method | — | 2022-10-04 |
| 11440137 | Laser peening device and laser peening method | Souichi Ueno, Hiroya ICHIKAWA, Kazuki Kora | 2022-09-13 |
| 11264246 | Plasma etching method for selectively etching silicon oxide with respect to silicon nitride | Hikaru Watanabe | 2022-03-01 |