Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11530917 | Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates | Eugene H. Cook, Jonathan J. Bernstein, Marc S. Weinberg, William D. Sawyer | 2022-12-20 |