Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11530917 | Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates | Jonathan J. Bernstein, Mirela G. Bancu, Marc S. Weinberg, William D. Sawyer | 2022-12-20 |
| 11237335 | Optical switch controllable by vertical motion MEMS structure | Michael G. Moebius, Steven J. Spector, Jonathan J. Bernstein | 2022-02-01 |