Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476129 | Translating and rotating chuck for processing microelectronic substrates in a process chamber | Edward Hanzlik, Tim Herbst | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476129 | Translating and rotating chuck for processing microelectronic substrates in a process chamber | Edward Hanzlik, Tim Herbst | 2022-10-18 |