Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476129 | Translating and rotating chuck for processing microelectronic substrates in a process chamber | Michael Gruenhagen, Tim Herbst | 2022-10-18 |
| 11241720 | Pressure control strategies to provide uniform treatment streams in the manufacture of microelectronic devices | Kevin L. Siefering | 2022-02-08 |