Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454891 | Manufacturing method of semiconductor device and semiconductor processing system | Chia-Hung Chung, Ko-Bin Kao, Su-Yu Yeh, Li-Jen Wu, Zhi-You Ke +1 more | 2022-09-27 |
| 11392039 | Photoresist baking apparatus with cover plate having uneven exhaust hole distribution | Po-Hung Chen | 2022-07-19 |
| 11378888 | Lens adjustment for an edge exposure tool | Yong Wu | 2022-07-05 |
| 11373905 | Semiconductor device pre-cleaning | Li-Wei Chu, Ying-Chi SU, Wei-Yip Loh, Hung-Hsu Chen, Chih-Wei Chang +1 more | 2022-06-28 |
| 11273396 | Liquid supply system with improved bubble venting capacity | Y. L. Huang, Chin-Kun Fang, Li-Jen Wu | 2022-03-15 |
| 11232947 | Ammonium fluoride pre-clean protection | Li-Wei Chu, Ying-Chi SU, Wei-Yip Loh, Hung-Hsu Chen, Chih-Wei Chang +1 more | 2022-01-25 |
| 11232985 | Method of forming contact metal | Chun-Hsien Huang, Hong-Mao Lee, Hsien-Lung Yang, Wei-Jung Lin | 2022-01-25 |