Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373905 | Semiconductor device pre-cleaning | Li-Wei Chu, Yu-Kai Chen, Wei-Yip Loh, Hung-Hsu Chen, Chih-Wei Chang +1 more | 2022-06-28 |
| 11232947 | Ammonium fluoride pre-clean protection | Li-Wei Chu, Yu-Kai Chen, Wei-Yip Loh, Hung-Hsu Chen, Chih-Wei Chang +1 more | 2022-01-25 |