Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532459 | Chemical vapor deposition apparatus with cleaning gas flow guiding member | Chih-hung Yeh, Tsung-Lin Lee, Yi-Ming Lin, Sheng-chun Yang | 2022-12-20 |
| 11315810 | Apparatus for wafer processing | Sung-Po Yang, Feng-Tao Lee, Shih-Fang Chen | 2022-04-26 |