Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532459 | Chemical vapor deposition apparatus with cleaning gas flow guiding member | Chih-hung Yeh, Tsung-Lin Lee, Yi-Ming Lin, Tung-Ching Tseng | 2022-12-20 |
| 11443961 | Semiconductor fabrication apparatus | Chih-Tsung Lee, Yun-Tzu Chiu, Chao-Hung WAN, Yi-Ming Lin, Chyi-Tsong Ni | 2022-09-13 |