Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11446785 | Methods to clean chemical mechanical polishing systems | Chih-Chieh Chang, Yen-Ting Chen, Kei-Wei Chen | 2022-09-20 |
| 11417566 | Semiconductor device structure with interconnect structure and method for forming the same | Chun-Hao Kung, Chih-Chieh Chang, Kao-Feng Liao, Kei-Wei Chen | 2022-08-16 |
| 11373879 | Chemical mechanical polishing method | Tung-Kai Chen, Ching-Hsiang Tsai, Kao-Feng Liao, Chih-Chieh Chang, Chun-Hao Kung +4 more | 2022-06-28 |
| 11264232 | Methods and systems for chemical mechanical polish cleaning | Chien-Ping Lee | 2022-03-01 |
| 11217479 | Multiple metallization scheme | Hsin-Ying Ho, Fang-I Chih, Kei-Wei Chen | 2022-01-04 |