Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531271 | Lithography patterning with flexible solution adjustment | — | 2022-12-20 |
| 11222783 | Using cumulative heat amount data to qualify hot plate used for postexposure baking | Chia-Cheng Chao, Chun-Kuang Chen | 2022-01-11 |