Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11402743 | Mask defect prevention | Chi-Ta Lu, Chih-Chiang Tu, Cheng-Ming Lin, Wei-Chung Hu, Ting-Chang Hsu +1 more | 2022-08-02 |
| 11226551 | Lithographic mask, a pellicle therein and method of forming the same | Tzung-Shiun Liu | 2022-01-18 |