Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531263 | Photomask having a plurality of shielding layers | Chun-Lang Chen | 2022-12-20 |
| 11402743 | Mask defect prevention | Chi-Ta Lu, Cheng-Ming Lin, Ching-Yueh Chen, Wei-Chung Hu, Ting-Chang Hsu +1 more | 2022-08-02 |
| 11270884 | Reflection mode photomask | Chun-Lang Chen | 2022-03-08 |
| 11262658 | Photomask, photolithography system and manufacturing process | Che-Yuan Chang, Ming-Ho Tsai, Ching-Hung Lai | 2022-03-01 |