Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11502199 | Independent control of stacked semiconductor device | Keh-Jeng Chang, Chan-Lon Yang | 2022-11-15 |
| 11437371 | Field effect transistors with negative capacitance layers | Chan-Lon Yang, Keh-Jeng Chang | 2022-09-06 |
| 11351635 | Apparatus and method for directional etch with micron zone beam and angle control | Li-Te Lin, Pinyen Lin | 2022-06-07 |
| 11335606 | Power rails for stacked semiconductor device | Keh-Jeng Chang, Chan-Lon Yang | 2022-05-17 |
| 11282711 | Plasma-assisted etching of metal oxides | Keh-Jeng Chang, Chan-Lon Yang | 2022-03-22 |
| 11276604 | Radical-activated etching of metal oxides | Chan-Lon Yang, Keh-Jeng Chang, Perng-Fei Yuh | 2022-03-15 |