Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11484987 | Maintenance methods for polishing systems and articles related thereto | Shantanu Rajiv Gadgil, Sumit Subhash Patankar, Michael J. Coughlin, Allen L. D'Ambra | 2022-11-01 |
| 11370083 | Pad conditioner cleaning system | Shantanu Rajiv Gadgil, Sumit Subhash Patankar, Michael J. Coughlin, Allen L. D'Ambra | 2022-06-28 |