Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11484987 | Maintenance methods for polishing systems and articles related thereto | Shantanu Rajiv Gadgil, Sumit Subhash Patankar, Nathan Davis, Michael J. Coughlin | 2022-11-01 |
| 11433436 | Carousel for ultrasonic cleaning and method of using thereof | Michael J. Coughlin | 2022-09-06 |
| 11370083 | Pad conditioner cleaning system | Shantanu Rajiv Gadgil, Sumit Subhash Patankar, Nathan Davis, Michael J. Coughlin | 2022-06-28 |
| 11251047 | Clog detection in a multi-port fluid delivery system | Roy C. Nangoy, Chad Pollard | 2022-02-15 |