Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387132 | Ceramic material and electrostatic chuck device | Yoshiki Yoshioka, Hironori Kugimoto | 2022-07-12 |
| 11345639 | Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for producing composite sintered body | Naoto Kimura | 2022-05-31 |