Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387132 | Ceramic material and electrostatic chuck device | Nobuhiro Hidaka, Hironori Kugimoto | 2022-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387132 | Ceramic material and electrostatic chuck device | Nobuhiro Hidaka, Hironori Kugimoto | 2022-07-12 |