Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520138 | Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics | Roberto Carminati, Massimiliano MERLI | 2022-12-06 |
| 11353694 | Microelectromechanical mirror device with piezoelectric actuation, having an improved structure | Roberto Carminati, Massimiliano MERLI | 2022-06-07 |
| 11327295 | Resonant MEMS device having a tiltable, piezoelectrically controlled structure, in particular a micromirror | Roberto Carminati, Massimiliano MERLI | 2022-05-10 |