Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520138 | Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics | Nicolo' BONI, Roberto Carminati | 2022-12-06 |
| 11448871 | Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation and having stiffening elements | Nicolo′ Boni, Roberto Carminati | 2022-09-20 |
| 11353694 | Microelectromechanical mirror device with piezoelectric actuation, having an improved structure | Nicolo' BONI, Roberto Carminati | 2022-06-07 |
| 11327295 | Resonant MEMS device having a tiltable, piezoelectrically controlled structure, in particular a micromirror | Roberto Carminati, Nicolo' BONI | 2022-05-10 |