Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360377 | Half-tone attenuated phase shift blankmask and photomask for EUV lithography | Cheol Shin, Jong-Hwa Lee, Chul-Kyu YANG | 2022-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360377 | Half-tone attenuated phase shift blankmask and photomask for EUV lithography | Cheol Shin, Jong-Hwa Lee, Chul-Kyu YANG | 2022-06-14 |