Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11467485 | Blankmask and photomask for extreme ultraviolet lithography | Cheol Shin, Jong-Hwa Lee, Chul-Kyu YANG, Gyeong-Won SEO | 2022-10-11 |
| 11435661 | Reflective type blankmask for EUV, and method for manufacturing the same | Chul-Kyu YANG | 2022-09-06 |