Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508630 | Thin film analyzing device and thin film analyzing method | Yuki WAKISAKA, Sho Kato, Takumi Nishioka | 2022-11-22 |
| 11342182 | Substrate treatment device, substrate treatment method, and semiconductor device manufacturing method | Yasuhito Yoshimizu, Fuyuma Ito, Hakuba Kitagawa, Yohei Yamamoto, Hisashi Okuchi | 2022-05-24 |