Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342182 | Substrate treatment device, substrate treatment method, and semiconductor device manufacturing method | Yasuhito Yoshimizu, Fuyuma Ito, Hakuba Kitagawa, Yohei Yamamoto, Yuji Yamada | 2022-05-24 |