Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454647 | Scanning type probe microscope and control device for scanning type probe microscope | Kazuma Watanabe, Keita Fujino, Masato Hirade, Hideo Nakajima, Yuichiro Ikeda +1 more | 2022-09-27 |
| 11448663 | Pattern height information correction system and pattern height information correction method | Hiroyuki Shindo, Taeko Kashiwa, Ryugo KAGETANI | 2022-09-20 |
| 11346856 | Scanning probe microscope and optical axis adjustment method in scanning probe microscope | — | 2022-05-31 |